Publication:
The use of functionally graded poly-SiGe layers for MEMS applications
Date
| dc.contributor.author | Witvrouw, Ann | |
| dc.contributor.author | Mehta, Anshu | |
| dc.date.accessioned | 2021-10-16T07:12:50Z | |
| dc.date.available | 2021-10-16T07:12:50Z | |
| dc.date.issued | 2005 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/11567 | |
| dc.source.beginpage | 255 | |
| dc.source.conference | Functionally Graded Materials VIII | |
| dc.source.conferencedate | 11/07/2004 | |
| dc.source.conferencelocation | Leuven Belgium | |
| dc.source.endpage | 260 | |
| dc.title | The use of functionally graded poly-SiGe layers for MEMS applications | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |