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Stress in silicon due to the formation of self aligned poly-CoSi2 lines studied by micro-Raman spectroscopy
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1916 since deposited on 2021-09-29
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Acq. date: 2026-10-08
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Statistics
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1916 since deposited on 2021-09-29
3last month
3last week
Acq. date: 2026-10-08
Citations