Publication:
Stress in silicon due to the formation of self aligned poly-CoSi2 lines studied by micro-Raman spectroscopy
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1910 since deposited on 2021-09-29
1last month
Acq. date: 2026-02-24
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1910 since deposited on 2021-09-29
1last month
Acq. date: 2026-02-24
Citations