Publication:
Contact hole multiplication using grapho-epitaxy directed self-assembly: process choices, template optimization, and placement accuracy
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1930 since deposited on 2021-10-22
2last month
Acq. date: 2026-02-25
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Statistics
Views
1930 since deposited on 2021-10-22
2last month
Acq. date: 2026-02-25
Citations