Publication:
Controllable change of porosity of SiOCH low-k dielectric film
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Views
1871 since deposited on 2021-10-14
Acq. date: 2025-12-10
Citations
Metrics
Views
1871 since deposited on 2021-10-14
Acq. date: 2025-12-10
Citations