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Chemical analysis of thin films in electronic devices by analytical transmission electron microscopy methodologies

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dc.contributor.authorVerleysen, Eveline
dc.contributor.thesisadvisorVandervorst, Wilfried
dc.contributor.thesisadvisorSchryvers, D.
dc.date.accessioned2021-10-21T14:09:17Z
dc.date.available2021-10-21T14:09:17Z
dc.date.embargo9999-12-31
dc.date.issued2013-03
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23339
dc.title

Chemical analysis of thin films in electronic devices by analytical transmission electron microscopy methodologies

dc.typePHD thesis
dspace.entity.typePublication
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