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Understanding of trap-assisted tunneling current - assisted by oxygen vacancies in RuOx/SrTiO3/TiN MIM capacitor for the DRAM Application
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Understanding of trap-assisted tunneling current - assisted by oxygen vacancies in RuOx/SrTiO3/TiN MIM capacitor for the DRAM Application
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Date
2012
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Kim, Min-Soo
;
Kaczer, Ben
;
Starschich, Sergej
;
Popovici, Mihaela Ioana
;
Swerts, Johan
;
Richard, Olivier
;
Tomida, Kazuyuki
;
Vrancken, Christa
;
Van Elshocht, Sven
;
Debusschere, Ingrid
;
Altimime, Laith
;
Kittl, Jorge
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1852
since deposited on 2021-10-20
Acq. date: 2025-12-15
Citations
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Views
1852
since deposited on 2021-10-20
Acq. date: 2025-12-15
Citations