Publication:
CMP process: optimization, analysis and challenges
Date
| dc.contributor.author | Teugels, Lieve | |
| dc.contributor.imecauthor | Teugels, Lieve | |
| dc.contributor.orcidimec | Teugels, Lieve::0000-0002-6613-9414 | |
| dc.date.accessioned | 2021-10-26T05:28:11Z | |
| dc.date.available | 2021-10-26T05:28:11Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31928 | |
| dc.source.conference | ASML Patterning Technical Meeting | |
| dc.source.conferencedate | 10/12/2018 | |
| dc.source.conferencelocation | ? ? | |
| dc.title | CMP process: optimization, analysis and challenges | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |