Fundamental Principles of Phase Shifting Masks by Fourier Optics: Theory and Experimental Verification

dc.contributor.author	Ronse, Kurt
dc.contributor.author	Op de Beeck, Maaike
dc.contributor.author	Van den hove, Luc
dc.contributor.author	Engelen, J.
dc.contributor.imecauthor	Ronse, Kurt
dc.contributor.imecauthor	Op de Beeck, Maaike
dc.contributor.imecauthor	Van den hove, Luc
dc.contributor.orcidimec	Op de Beeck, Maaike::0000-0002-2700-6432
dc.date.accessioned	2021-09-29T12:46:07Z
dc.date.available	2021-09-29T12:46:07Z
dc.date.issued	1994
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/315
dc.source.beginpage	589
dc.source.endpage	600
dc.source.issue	2
dc.source.journal	J. Vac. Sci. Technol. B
dc.source.volume	12
dc.title	Fundamental Principles of Phase Shifting Masks by Fourier Optics: Theory and Experimental Verification
dc.type	Journal article
dspace.entity.type	Publication
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