Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Presentations
Surface redeposition and damage due to focused ion beam milling
Publication:
Surface redeposition and damage due to focused ion beam milling
Copy permalink
Date
2015
Presentation
Simple item page
Full metadata
Statistics
Loading...
Loading...
Files
32399.pdf
395.33 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bender, Hugo
;
Franquet, Alexis
;
Drijbooms, Chris
;
Parmentier, Brigitte
;
Vandervorst, Wilfried
;
Kwakman, Laurens
Journal
Abstract
Description
Metrics
Views
1970
since deposited on 2021-10-22
Acq. date: 2026-01-09
Citations
Metrics
Views
1970
since deposited on 2021-10-22
Acq. date: 2026-01-09
Citations