Publication:

XRD investigation of the crystalline quality of Sn-doped β-Ga2O3 films deposited by the RF magnetron sputtering method

Date

2012
Journal article
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Author(s)

Kudou, Jyun
;
Funasaki, Suguru
;
Takahara, Motoki
;
Takakura, Kenichiro  
;
Ohyama, Hidenori
;
Nakashima, Toshiyuki
;
Shibuya, Mutsuo
;
Murakami, Katsuya
;
Simoen, Eddy  
;
Claeys, Cor

Journal

Materials Science Forum

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