Silicide engineering: influence of alloying elements on CoSi2 nucleation

dc.contributor.author	Detavernier, C.
dc.contributor.author	Van Meirhaeghe, R. L.
dc.contributor.author	Maex, Karen
dc.contributor.author	Cardon, F.
dc.contributor.imecauthor	Maex, Karen
dc.date.accessioned	2021-10-14T12:54:59Z
dc.date.available	2021-10-14T12:54:59Z
dc.date.embargo	9999-12-31
dc.date.issued	2000
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/4341
dc.source.conference	MRS Spring Meeting Symposium: Gate stack and silicide issues in silicon processing; 2000;
dc.source.conferencelocation
dc.title	Silicide engineering: influence of alloying elements on CoSi2 nucleation
dc.type	Oral presentation
dspace.entity.type	Publication
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