Publication:
Artifacts in SIMS depth profiling
Date
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.author | De Witte, Hilde | |
| dc.contributor.author | Tian, Chunsheng | |
| dc.contributor.author | Geenen, Luc | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.date.accessioned | 2021-09-30T09:56:43Z | |
| dc.date.available | 2021-09-30T09:56:43Z | |
| dc.date.issued | 1997 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2263 | |
| dc.source.conference | SIMS XI; 8-12 September 1997; Orlando, Fl., USA. | |
| dc.source.conferencelocation | ||
| dc.title | Artifacts in SIMS depth profiling | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |