Publication:
Carbon enhancement of SiO2 nucleation in buried oxide synthesis
Date
| dc.contributor.author | Efremov, A. A. | |
| dc.contributor.author | Litovchenko, V. G. | |
| dc.contributor.author | Romanova, G. P. | |
| dc.contributor.author | Sarikov, A. V. | |
| dc.contributor.author | Claeys, C. | |
| dc.date.accessioned | 2021-10-14T16:54:19Z | |
| dc.date.available | 2021-10-14T16:54:19Z | |
| dc.date.issued | 2001 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/5278 | |
| dc.source.beginpage | F92 | |
| dc.source.endpage | F97 | |
| dc.source.issue | 5 | |
| dc.source.journal | Journal of the Electrochemical Society | |
| dc.source.volume | 148 | |
| dc.title | Carbon enhancement of SiO2 nucleation in buried oxide synthesis | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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