Publication:

Quantification of nano-spreading resistance profiling data

Date

1997
Proceedings Paper
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dc.contributor.authorDe Wolf, Peter
dc.contributor.authorClarysse, Trudo
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-09-30T08:08:31Z
dc.date.available2021-09-30T08:08:31Z
dc.date.embargo9999-12-31
dc.date.issued1997
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/1831
dc.source.beginpage29.1
dc.source.conference4th International Workshop on the Measurement, Characterization and Modelling of Ultra-Shallow Doping Profiles
dc.source.conferencedate6/04/1997
dc.source.conferencelocationResearch Triangle Park, NC USA
dc.source.endpage29.11
dc.title

Quantification of nano-spreading resistance profiling data

dc.typeProceedings paper
dspace.entity.typePublication
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