Publication:

Morphology and defects in shallow trench isolation structures

Date

1999
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorStuer, Cindy
dc.contributor.authorVan Landuyt, J.
dc.contributor.authorBender, Hugo
dc.contributor.authorRooyackers, Rita
dc.contributor.authorBadenes, Gonçal
dc.contributor.imecauthorBender, Hugo
dc.date.accessioned2021-10-14T11:42:04Z
dc.date.available2021-10-14T11:42:04Z
dc.date.embargo9999-12-31
dc.date.issued1999
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/3867
dc.source.beginpage443
dc.source.conferenceMicroscopy of Semiconducting Materials
dc.source.conferencedate22/03/1999
dc.source.conferencelocationOxford UK
dc.source.endpage446
dc.title

Morphology and defects in shallow trench isolation structures

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
3835.pdf
Size:
675.83 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions