Diffusion mechanism of hydrogen through PECVD SiNx:H for a fast defect passivation of mc-Si solar cells

dc.contributor.author	Dekkers, Harold
dc.contributor.author	Carnel, Lodewijk
dc.contributor.author	Beaucarne, Guy
dc.contributor.author	Beyer, W.
dc.contributor.imecauthor	Dekkers, Harold
dc.contributor.orcidimec	Dekkers, Harold::0000-0003-4778-5709
dc.date.accessioned	2021-10-16T01:18:13Z
dc.date.available	2021-10-16T01:18:13Z
dc.date.issued	2005
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/10364
dc.source.beginpage	721
dc.source.conference	Proceedings of the 20th European Photovoltaic Solar Energy Conference and Exhibition
dc.source.conferencedate	6/06/2005
dc.source.conferencelocation	Barcelona Spain
dc.source.endpage	724
dc.title	Diffusion mechanism of hydrogen through PECVD SiNx:H for a fast defect passivation of mc-Si solar cells
dc.type	Proceedings paper
dspace.entity.type	Publication
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