Publication:

Preventing the Capillary-Induced Collapse of Vertical Nanostructures

Date

2022
Journal article
https://doi.org/10.1021/acsami.1c17781
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dc.contributor.authorGhosh, Tanmay
dc.contributor.authorFritz, Eva-Corinna
dc.contributor.authorBalakrishnan, Deepan
dc.contributor.authorZhang, Ziyu
dc.contributor.authorVrancken, Nandi
dc.contributor.authorAnand, Utkarsh
dc.contributor.authorZhang, Hong
dc.contributor.authorLoh, N. Duane
dc.contributor.authorXu, XiuMei
dc.contributor.authorHolsteyns, Frank
dc.contributor.authorNijhuis, Christian A.
dc.contributor.authorMirsaidov, Utkur
dc.contributor.imecauthorVrancken, Nandi
dc.contributor.imecauthorXu, XiuMei
dc.contributor.imecauthorHolsteyns, Frank
dc.contributor.orcidimecXu, XiuMei::0000-0002-3356-8693
dc.date.accessioned2022-12-15T13:13:46Z
dc.date.available2022-03-26T02:08:17Z
dc.date.available2022-12-15T13:13:46Z
dc.date.embargo2023-07-18
dc.date.issued2022
dc.identifier.doi10.1021/acsami.1c17781
dc.identifier.issn1944-8244
dc.identifier.pmidMEDLINE:35040618
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39527
dc.publisherAMER CHEMICAL SOC
dc.source.beginpage5537
dc.source.endpage5544
dc.source.issue4
dc.source.journalACS APPLIED MATERIALS & INTERFACES
dc.source.numberofpages8
dc.source.volume14
dc.subject.keywordsANTI-STICTION COATINGS
dc.subject.keywordsPATTERN COLLAPSE
dc.subject.keywordsFABRICATION
dc.subject.keywordsSURFACES
dc.subject.keywordsFORCES
dc.subject.keywordsARRAYS
dc.title

Preventing the Capillary-Induced Collapse of Vertical Nanostructures

dc.typeJournal article
dspace.entity.typePublication
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