Publication:

Influence of gate patterning on line edge roughness

Date

2003
Journal article
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dc.contributor.authorLeunissen, Peter
dc.contributor.authorJonckheere, Rik
dc.contributor.authorRonse, Kurt
dc.contributor.authorDerksen, G.B.
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.accessioned2021-10-15T05:22:56Z
dc.date.available2021-10-15T05:22:56Z
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/7800
dc.source.beginpage3140
dc.source.endpage3148
dc.source.issue6
dc.source.journalJournal of Vacuum Science & Technology B
dc.source.volume21
dc.title

Influence of gate patterning on line edge roughness

dc.typeJournal article
dspace.entity.typePublication
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