Reliability study on cobalt and ruthenium as alternative metals for advance interconnects

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Author(s)

Varela Pedreira, Olalla

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Lesniewska, Alicja

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van der Veen, Marleen

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De Messemaeker, Joke

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Vandersmissen, Kevin

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Jourdan, Nicolas

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Wen, Liang Gong

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Adelmann, Christoph

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Briggs, Basoene

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Vega Gonzalez, Victor

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Boemmels, Juergen

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Metrics

1963 since deposited on 2021-10-24

Acq. date: 2025-10-24