Publication:
High-Fidelity Directed Self-Assembly Using Higher-<i>Ï </i> Polystyrene-<i>Block</i>-Poly(Methyl Methacrylate) Derivatives for Dislocation-Free Sub-10 nm Features
| dc.contributor.author | Maekawa, Shinsuke | |
| dc.contributor.author | Verstraete, Lander | |
| dc.contributor.author | Suh, Hyo Seon | |
| dc.contributor.author | Seshimo, Takehiro | |
| dc.contributor.author | Dazai, Takahiro | |
| dc.contributor.author | Sato, Kazufumi | |
| dc.contributor.author | Hatakeyama-Sato, Kan | |
| dc.contributor.author | Nabae, Yuta | |
| dc.contributor.author | Hayakawa, Teruaki | |
| dc.contributor.imecauthor | Verstraete, Lander | |
| dc.contributor.imecauthor | Suh, Hyo Seon | |
| dc.contributor.orcidimec | Verstraete, Lander::0000-0002-3679-811X | |
| dc.contributor.orcidimec | Suh, Hyo Seon::0000-0003-4370-5062 | |
| dc.date.accessioned | 2025-02-27T19:41:24Z | |
| dc.date.available | 2025-02-27T19:41:24Z | |
| dc.date.issued | 2025-FEB 12 | |
| dc.description.wosFundingText | The manuscript was written with contributions from all the authors. All the authors approved the final version of the manuscript. The authors thank Dr. Noboru Ohta (JASRI) and Prof. Tomoyasu Hirai (Osaka Institute of Technology) for SAXS measurements at the BL40B2 beamline of SPring-8 (Proposal no. 2024A1166). The authors also thank Ryohei Kikuchi (Core Facility Center, Institute of Science Tokyo) for the TEM and cross-sectional SEM support. This work was supported by JSPS KAKENHI (grant numbers 20H02785 and 24H00052). S. M. was supported by JST SPRING (grant numbers: JPMJSP2106 and JPMJSP2180). | |
| dc.identifier.doi | 10.1002/adfm.202421066 | |
| dc.identifier.issn | 1616-301X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45265 | |
| dc.publisher | WILEY-V C H VERLAG GMBH | |
| dc.source.journal | ADVANCED FUNCTIONAL MATERIALS | |
| dc.source.numberofpages | 11 | |
| dc.subject.keywords | COPOLYMER THIN-FILMS | |
| dc.subject.keywords | BLOCK-COPOLYMERS | |
| dc.subject.keywords | CHEMICAL-PATTERNS | |
| dc.subject.keywords | MICRODOMAINS | |
| dc.subject.keywords | PHOTORESISTS | |
| dc.subject.keywords | LITHOGRAPHY | |
| dc.subject.keywords | SEGREGATION | |
| dc.subject.keywords | POLYMERS | |
| dc.title | High-Fidelity Directed Self-Assembly Using Higher-Ï Polystyrene-Block-Poly(Methyl Methacrylate) Derivatives for Dislocation-Free Sub-10 nm Features | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |