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ToF-SIMS profiling of HfO2/Si stacks: influence of sputtering condition of profile shape

Date

2004
Journal article
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dc.contributor.authorConard, Thierry
dc.contributor.authorHuyghebaert, Cedric
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorHuyghebaert, Cedric
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecHuyghebaert, Cedric::0000-0001-6043-7130
dc.date.accessioned2021-10-15T12:56:02Z
dc.date.available2021-10-15T12:56:02Z
dc.date.issued2004
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8715
dc.source.beginpage574
dc.source.endpage580
dc.source.journalApplied Surface Science
dc.source.volume231-232
dc.title

ToF-SIMS profiling of HfO2/Si stacks: influence of sputtering condition of profile shape

dc.typeJournal article
dspace.entity.typePublication
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