Publication:
Characterisation of the local stress in CoSi2 silicided shallow trench isolation structures
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1939 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-08
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Metrics
Views
1939 since deposited on 2021-10-14
1last month
Acq. date: 2025-12-08
Citations