Publication:
Wafer-level thin film vacuum packages for MEMS using nanoporous anodic alumina membranes
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1901 since deposited on 2021-10-19
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Acq. date: 2026-09-16
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Statistics
Views
1901 since deposited on 2021-10-19
1last month
1last week
Acq. date: 2026-09-16
Citations