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Implementation of a Si-rich SiON layer for an improved selective SiGe HBT architecture

Date

2002
Proceedings Paper
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dc.contributor.authorVan Huylenbroeck, Stefaan
dc.contributor.authorLoo, Roger
dc.contributor.authorDecoutere, Stefaan
dc.contributor.authorVleugels, Frank
dc.contributor.authorKunnen, Eddy
dc.contributor.authorSchaekers, Marc
dc.contributor.authorCaymax, Matty
dc.contributor.imecauthorVan Huylenbroeck, Stefaan
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorDecoutere, Stefaan
dc.contributor.imecauthorVleugels, Frank
dc.contributor.imecauthorSchaekers, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.orcidimecVan Huylenbroeck, Stefaan::0000-0001-9978-3575
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecDecoutere, Stefaan::0000-0001-6632-6239
dc.contributor.orcidimecSchaekers, Marc::0000-0002-1496-7816
dc.date.accessioned2021-10-14T23:36:05Z
dc.date.available2021-10-14T23:36:05Z
dc.date.issued2002
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/6944
dc.source.beginpage143
dc.source.conferenceProceedings IEEE Bipolar/BiCMOS Circuits Technology Meeting
dc.source.conferencedate29/09/2002
dc.source.conferencelocationMonterey, CA USA
dc.source.endpage146
dc.title

Implementation of a Si-rich SiON layer for an improved selective SiGe HBT architecture

dc.typeProceedings paper
dspace.entity.typePublication
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