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On the elastic tensors of ultra-thin films: A study of ruthenium

 
dc.contributor.authorPashartis, Christopher
dc.contributor.authorvan Setten, Michiel
dc.contributor.authorHoussa, Michel
dc.contributor.authorPourtois, Geoffrey
dc.contributor.imecauthorPashartis, Christopher
dc.contributor.imecauthorvan Setten, Michiel
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.orcidimecvan Setten, Michiel::0000-0003-0557-5260
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecPashartis, Christopher::0000-0002-9102-4993
dc.date.accessioned2022-06-08T09:26:20Z
dc.date.available2022-05-30T02:21:26Z
dc.date.available2022-06-08T09:26:20Z
dc.date.issued2022
dc.description.wosFundingTextThe resources and services used in this work were partly provided by the VSC (Flemish Supercomputer Center) , funded by the Research Foundation-Flanders (FWO) , Belgium and the Flemish Government, Belgium. The various members of our group for discussions and aid over the course of this research.
dc.identifier.doi10.1016/j.apsusc.2022.153194
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/39909
dc.publisherELSEVIER
dc.source.beginpage153194
dc.source.issuena
dc.source.journalAPPLIED SURFACE SCIENCE
dc.source.numberofpages9
dc.source.volume592
dc.subject.keywordsDELAMINATION
dc.subject.keywordsPSEUDOPOTENTIALS
dc.subject.keywordsINTEGRATION
dc.subject.keywordsCHALLENGES
dc.subject.keywordsSTABILITY
dc.title

On the elastic tensors of ultra-thin films: A study of ruthenium

dc.typeJournal article
dspace.entity.typePublication
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