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Integrated diffusion - recombination model for describing the logarithmic time dependence of plasma damage in porous low-k materials

Date

2010
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dc.contributor.authorKunnen, Eddy
dc.contributor.authorBarkema, Gerard
dc.contributor.authorMaes, Christian
dc.contributor.authorShamiryan, Denis
dc.contributor.authorUrbanowicz, Adam
dc.contributor.authorStruyf, Herbert
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.imecauthorStruyf, Herbert
dc.date.accessioned2021-10-18T17:50:39Z
dc.date.available2021-10-18T17:50:39Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17408
dc.source.conferenceMaterials for Advanced Metallization - MAM
dc.source.conferencedate8/03/2010
dc.source.conferencelocationMechelen Belgium
dc.title

Integrated diffusion - recombination model for describing the logarithmic time dependence of plasma damage in porous low-k materials

dc.typeMeeting abstract
dspace.entity.typePublication
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