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Inspection, characterization and classification of defects for improved CMP of III-V materials

Date

2015
Proceedings Paper
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dc.contributor.authorBhonsle, Rithu
dc.contributor.authorTeugels, Lieve
dc.contributor.authorUsman Ibrahim, Ansar
dc.contributor.authorOng, Patrick
dc.contributor.authorDelande, Tinne
dc.contributor.authorKrishnan, Sitaraman
dc.contributor.authorSiebert, Max
dc.contributor.authorStruyf, Herbert
dc.contributor.authorLeunissen, Leonardus
dc.contributor.imecauthorTeugels, Lieve
dc.contributor.imecauthorUsman Ibrahim, Ansar
dc.contributor.imecauthorOng, Patrick
dc.contributor.imecauthorDelande, Tinne
dc.contributor.imecauthorStruyf, Herbert
dc.contributor.orcidimecTeugels, Lieve::0000-0002-6613-9414
dc.contributor.orcidimecOng, Patrick::0000-0002-2072-292X
dc.date.accessioned2021-10-22T18:33:23Z
dc.date.available2021-10-22T18:33:23Z
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/24993
dc.source.conference34th CMP Users Meeting
dc.source.conferencedate29/10/2015
dc.source.conferencelocationRegensburg Germany
dc.title

Inspection, characterization and classification of defects for improved CMP of III-V materials

dc.typeProceedings paper
dspace.entity.typePublication
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