Publication:
Thin oxide C-V measurements and reliability in thin oxides
Date
| dc.contributor.author | Schmitz, Jurriaan | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.date.accessioned | 2021-10-14T23:04:15Z | |
| dc.date.available | 2021-10-14T23:04:15Z | |
| dc.date.issued | 2002 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/6799 | |
| dc.source.conference | International Conference on Microelectronic Test Structures - ICMTS | |
| dc.source.conferencedate | 8/04/2002 | |
| dc.source.conferencelocation | Cork Ireland | |
| dc.title | Thin oxide C-V measurements and reliability in thin oxides | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
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