Publication:

Imaging performance of the EUV alpha demo tool at IMEC

Date

2008
Proceedings Paper
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dc.contributor.authorLorusso, Gian
dc.contributor.authorHermans, Jan
dc.contributor.authorGoethals, Mieke
dc.contributor.authorBaudemprez, Bart
dc.contributor.authorVan Roey, Frieda
dc.contributor.authorMyers, Alan
dc.contributor.authorKim, In Sung
dc.contributor.authorKim, Byeong Soo
dc.contributor.authorJonckheere, Rik
dc.contributor.authorNiroomand, Ardavan
dc.contributor.authorLok, E.
dc.contributor.authorVan Dijk, A.
dc.contributor.authorde Marneffe, Jean-Francois
dc.contributor.authorDemuynck, Steven
dc.contributor.authorGoossens, Danny
dc.contributor.authorRonse, Kurt
dc.contributor.imecauthorLorusso, Gian
dc.contributor.imecauthorHermans, Jan
dc.contributor.imecauthorBaudemprez, Bart
dc.contributor.imecauthorVan Roey, Frieda
dc.contributor.imecauthorJonckheere, Rik
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.imecauthorDemuynck, Steven
dc.contributor.imecauthorGoossens, Danny
dc.contributor.imecauthorRonse, Kurt
dc.contributor.orcidimecHermans, Jan::0000-0003-1249-8902
dc.contributor.orcidimecJonckheere, Rik::0000-0003-2211-9443
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.accessioned2021-10-17T08:32:29Z
dc.date.available2021-10-17T08:32:29Z
dc.date.embargo9999-12-31
dc.date.issued2008
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14066
dc.source.beginpage69210O
dc.source.conferenceEmerging Lithographic Technologies XII
dc.source.conferencedate24/02/2008
dc.source.conferencelocationSan Jose, CA USA
dc.title

Imaging performance of the EUV alpha demo tool at IMEC

dc.typeProceedings paper
dspace.entity.typePublication
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