Publication:
Atom probe tomography for advanced semiconductor technology research
Date
| dc.contributor.author | Fleischmann, Claudia | |
| dc.contributor.author | Melkonyan, Davit | |
| dc.contributor.author | Arnoldi, Laurent | |
| dc.contributor.author | Morris, Richard | |
| dc.contributor.author | Bogdanowicz, Janusz | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Fleischmann, Claudia | |
| dc.contributor.imecauthor | Morris, Richard | |
| dc.contributor.imecauthor | Bogdanowicz, Janusz | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Fleischmann, Claudia::0000-0003-1531-6916 | |
| dc.contributor.orcidimec | Morris, Richard::0000-0002-0902-7088 | |
| dc.contributor.orcidimec | Bogdanowicz, Janusz::0000-0002-7503-8922 | |
| dc.date.accessioned | 2021-10-24T04:44:36Z | |
| dc.date.available | 2021-10-24T04:44:36Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28337 | |
| dc.identifier.url | https://www.european-mrs.com/sites/default/files/pdf/conference_program.pdf | |
| dc.source.beginpage | S10 - P.7 | |
| dc.source.conference | E-MRS Spring Meeting Symposium S: Analytical Techniques for Precise Characterization of Nano Materials | |
| dc.source.conferencedate | 22/05/2017 | |
| dc.source.conferencelocation | Strasbourg France | |
| dc.title | Atom probe tomography for advanced semiconductor technology research | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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