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Characterization of nano-laminate structure using grazing incidence XRD and ATR-FTIR

Date

2003
Proceedings Paper
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dc.contributor.authorZhao, Chao
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.contributor.authorCosnier, Vincent
dc.contributor.authorMaes, Jan
dc.contributor.authorRoebben, G.
dc.contributor.authorVan der Biest, O.
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.imecauthorMaes, Jan
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-15T07:59:33Z
dc.date.available2021-10-15T07:59:33Z
dc.date.embargo9999-12-31
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8440
dc.source.beginpage252
dc.source.conferenceAnalytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
dc.source.conferencedate27/04/2003
dc.source.conferencelocationParis France
dc.source.endpage259
dc.title

Characterization of nano-laminate structure using grazing incidence XRD and ATR-FTIR

dc.typeProceedings paper
dspace.entity.typePublication
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