Publication:

Effect of degas before metal gate deposition on the threshold voltage

Date

2007
Journal article
Simple item page Full metadata Statistics
 
dc.contributor.authorPetry, Jasmine
dc.contributor.authorXiong, K.
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorSinganamalla, Raghunath
dc.contributor.authorHooker, Jacob
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.date.accessioned2021-10-16T18:36:34Z
dc.date.available2021-10-16T18:36:34Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/12700
dc.source.beginpage2255
dc.source.endpage2258
dc.source.issue9_10
dc.source.journalMicroelectronic Engineering
dc.source.volume84
dc.title

Effect of degas before metal gate deposition on the threshold voltage

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles