Publication:
Characterising differences between measurement and calibration wafer in probe-tip calibrations
Date
| dc.contributor.author | Carchon, Geert | |
| dc.contributor.author | Nauwelaers, Bart | |
| dc.contributor.author | De Raedt, Walter | |
| dc.contributor.author | Schreurs, Dominique | |
| dc.contributor.author | Vandenberghe, S. | |
| dc.contributor.imecauthor | Nauwelaers, Bart | |
| dc.contributor.imecauthor | De Raedt, Walter | |
| dc.contributor.imecauthor | Schreurs, Dominique | |
| dc.date.accessioned | 2021-10-06T10:47:18Z | |
| dc.date.available | 2021-10-06T10:47:18Z | |
| dc.date.issued | 1999 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/3289 | |
| dc.source.beginpage | 1087 | |
| dc.source.endpage | 1088 | |
| dc.source.issue | 13 | |
| dc.source.journal | Electronics Letters | |
| dc.source.volume | 35 | |
| dc.title | Characterising differences between measurement and calibration wafer in probe-tip calibrations | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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