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Conference contributions
Sub 100nm particle removal with deionized water and a megasonic frequency of ~835kHz
Publication:
Sub 100nm particle removal with deionized water and a megasonic frequency of ~835kHz
Date
2001
Meeting abstract
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Lauerhaas, Jeff
;
Xu, Kaidong
;
Vereecke, Guy
;
Vos, Rita
;
Kenis, Karine
;
Mertens, Paul
;
Wu, Y.
;
Nicolosi, T.
;
Heyns, Marc
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1994
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1994
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations