Publication:

Advanced characterization of 2D materials using SEM image processing and machine learning

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3014378
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dc.contributor.authorSaib, Mohamed
dc.contributor.authorMoussa, Alain
dc.contributor.authorBeggiato, Matteo
dc.contributor.authorGroven, Benjamin
dc.contributor.authorMedina Silva, Henry
dc.contributor.authorMorin, Pierre
dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorKar, Gouri Sankar
dc.contributor.authorCharley, Anne-Laure
dc.contributor.imecauthorSaib, Mohamed
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorBeggiato, Matteo
dc.contributor.imecauthorGroven, Benjamin
dc.contributor.imecauthorMorin, Pierre
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorKar, Gouri Sankar
dc.contributor.imecauthorCharley, Anne-Laure
dc.contributor.imecauthorMedina Silva, Henry
dc.contributor.orcidimecSaib, Mohamed::0000-0002-5153-5553
dc.contributor.orcidimecMoussa, Alain::0000-0002-6377-4199
dc.contributor.orcidimecBeggiato, Matteo::0000-0003-0873-9021
dc.contributor.orcidimecGroven, Benjamin::0000-0002-5781-7594
dc.contributor.orcidimecMorin, Pierre::0000-0002-4637-496X
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecCharley, Anne-Laure::0000-0003-4745-0167
dc.contributor.orcidimecMedina Silva, Henry::0000-0003-1461-5703
dc.date.accessioned2024-08-19T15:00:28Z
dc.date.available2024-06-15T17:25:54Z
dc.date.available2024-08-19T15:00:28Z
dc.date.embargo2024-04-09
dc.date.issued2024
dc.identifier.doi10.1117/12.3014378
dc.identifier.eisbn978-1-5106-7217-8
dc.identifier.isbn978-1-5106-7216-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44053
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpage129550X
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVIII
dc.source.conferencedateFEB 26-29, 2024
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages15
dc.source.volume12955
dc.title

Advanced characterization of 2D materials using SEM image processing and machine learning

dc.typeProceedings paper
dspace.entity.typePublication
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