Publication:
High-throughput ion beam analysis at imec
Date
| dc.contributor.author | Meersschaut, Johan | |
| dc.contributor.author | Vandervorst, Wilfried | |
| dc.contributor.imecauthor | Meersschaut, Johan | |
| dc.contributor.imecauthor | Vandervorst, Wilfried | |
| dc.contributor.orcidimec | Meersschaut, Johan::0000-0003-2467-1784 | |
| dc.date.accessioned | 2021-10-24T09:02:27Z | |
| dc.date.available | 2021-10-24T09:02:27Z | |
| dc.date.issued | 2017 | |
| dc.identifier.issn | 0168-583X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28952 | |
| dc.identifier.url | http://dx.doi.org/10.1016/j.nimb.2017.01.005 | |
| dc.source.beginpage | 25 | |
| dc.source.endpage | 29 | |
| dc.source.journal | Nuclear Instruments and Methods in Physics Research B | |
| dc.source.volume | 406 | |
| dc.title | High-throughput ion beam analysis at imec | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
| Files | ||
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