Direct observation of both contact and remote oxygen scavenging of GeO2 in a metal-oxide-semiconductor stack

dc.contributor.author	Fadida, Sivan
dc.contributor.author	Shekhter, P.
dc.contributor.author	Cvetko, D.
dc.contributor.author	Floreano, L.
dc.contributor.author	Verdini, A
dc.contributor.author	Nyns, Laura
dc.contributor.author	Van Elshocht, Sven
dc.contributor.author	Kymissis, I.
dc.contributor.author	Eizenberg, Moshe
dc.contributor.imecauthor	Nyns, Laura
dc.contributor.imecauthor	Van Elshocht, Sven
dc.contributor.orcidimec	Nyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimec	Van Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned	2021-10-22T01:24:55Z
dc.date.available	2021-10-22T01:24:55Z
dc.date.issued	2014
dc.identifier.issn	0021-8979
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/23801
dc.identifier.url	http://dx.doi.org/10.1063/1.4898645
dc.source.beginpage	164101
dc.source.issue	16
dc.source.journal	Journal of Applied Physics
dc.source.volume	116
dc.title	Direct observation of both contact and remote oxygen scavenging of GeO2 in a metal-oxide-semiconductor stack
dc.type	Journal article
dspace.entity.type	Publication
Files
Publication available in collections:	Articles