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Scaling trends toward N3 and beyond: Device architecture and standard cells innovation impact on patterning and layout
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1839 since deposited on 2021-10-26
1last month
Acq. date: 2025-12-17
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Metrics
Views
1839 since deposited on 2021-10-26
1last month
Acq. date: 2025-12-17
Citations