Publication:

Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform

Date

2021
Proceedings Paper
https://doi.org/10.1109/GFP51802.2021.9673877
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dc.contributor.authorRajendran, Khannan
dc.contributor.authorPandey, Awanish
dc.contributor.authorEdinger, Pierre
dc.contributor.authorJo, Gaehun
dc.contributor.authorTakabayashi, Alain Yuji
dc.contributor.authorKhan, Muhammad Umar
dc.contributor.authorVerheyen, Peter
dc.contributor.authorQuack, Niels
dc.contributor.authorNiklaus, Frank
dc.contributor.authorBogaerts, Wim
dc.contributor.authorGylfason, Kristinn B.
dc.contributor.authorVan Thourhout, Dries
dc.contributor.imecauthorRajendran, Khannan
dc.contributor.imecauthorPandey, Awanish
dc.contributor.imecauthorKhan, Muhammad Umar
dc.contributor.imecauthorVerheyen, Peter
dc.contributor.imecauthorBogaerts, Wim
dc.contributor.imecauthorVan Thourhout, Dries
dc.contributor.orcidextEdinger, Pierre::0000-0002-7339-6662
dc.contributor.orcidextJo, Gaehun::0000-0002-2752-7422
dc.contributor.orcidextTakabayashi, Alain Yuji::0000-0002-1654-6636
dc.contributor.orcidextQuack, Niels::0000-0001-5189-0929
dc.contributor.orcidimecRajendran, Khannan::0000-0002-2195-655X
dc.contributor.orcidimecBogaerts, Wim::0000-0003-1112-8950
dc.contributor.orcidimecVan Thourhout, Dries::0000-0003-0111-431X
dc.contributor.orcidimecKhan, Muhammad Umar::0000-0001-5760-7485
dc.contributor.orcidimecVerheyen, Peter::0000-0002-8245-9442
dc.date.accessioned2023-08-08T08:17:59Z
dc.date.available2023-06-20T10:34:26Z
dc.date.available2023-08-08T08:17:59Z
dc.date.embargo2021-12-31
dc.date.issued2021
dc.identifier.doi10.1109/GFP51802.2021.9673877
dc.identifier.eisbn978-1-6654-2224-6
dc.identifier.issn1949-2081
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41849
dc.publisherIEEE
dc.source.conference17th IEEE International Conference on Group IV Photonics (GFP)
dc.source.conferencedateDEC 07-10, 2021
dc.source.conferencelocationMalaga
dc.source.journalna
dc.source.numberofpages2
dc.subject.keywordsOPTICAL FORCES
dc.title

Thermo-mechanical Noise Measurement of Sealed Nanobeams on a Silicon Photonics-MEMS Platform

dc.typeProceedings paper
dspace.entity.typePublication
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