Publication:

METALIZED SOFT POLYMERS FOR ELECTROMECHANICAL TRANSDUCERS ON GLASS SUBSTRATES

 
dc.contributor.authorLiang, Boshen
dc.contributor.authorKeulemans, Grim
dc.contributor.authorWysocka, Dominika
dc.contributor.authorZhang, Lei
dc.contributor.authorRochus, Veronique
dc.contributor.authorStakenborg, Tim
dc.contributor.authorHeremans, Paul
dc.contributor.authorCheyns, David
dc.contributor.imecauthorLiang, Boshen
dc.contributor.imecauthorKeulemans, Grim
dc.contributor.imecauthorWysocka, Dominika
dc.contributor.imecauthorZhang, Lei
dc.contributor.imecauthorRochus, Veronique
dc.contributor.imecauthorStakenborg, Tim
dc.contributor.imecauthorHeremans, Paul
dc.contributor.imecauthorCheyns, David
dc.contributor.orcidimecLiang, Boshen::0000-0003-3299-9034
dc.contributor.orcidimecKeulemans, Grim::0000-0001-6896-7275
dc.contributor.orcidimecStakenborg, Tim::0000-0001-9878-9078
dc.contributor.orcidimecHeremans, Paul::0000-0003-2151-1718
dc.contributor.orcidimecCheyns, David::0000-0002-1327-8752
dc.contributor.orcidimecWysocka, Dominika::0000-0001-5056-6502
dc.contributor.orcidimecZhang, Lei::0000-0002-7405-6352
dc.contributor.orcidimecRochus, Veronique::0000-0001-9680-5724
dc.date.accessioned2023-01-19T16:15:13Z
dc.date.available2021-11-05T03:02:04Z
dc.date.available2023-01-19T16:15:13Z
dc.date.issued2021
dc.identifier.doi10.1109/TRANSDUCERS50396.2021.9495385
dc.identifier.eisbn978-0-7381-2562-6
dc.identifier.issn2167-0013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38389
dc.publisherIEEE
dc.source.beginpage623
dc.source.conference21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
dc.source.conferencedateJUN 20-25, 2021
dc.source.conferencelocationOrlando
dc.source.endpage626
dc.source.journalna
dc.source.numberofpages4
dc.title

METALIZED SOFT POLYMERS FOR ELECTROMECHANICAL TRANSDUCERS ON GLASS SUBSTRATES

dc.typeProceedings paper
dspace.entity.typePublication
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