Publication:

Opportunities and challenges in device scaling by the introduction of EUV lithography

Date

2012
Proceedings Paper
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Author(s)

Ronse, Kurt  
;
De Bisschop, Peter  
;
Vandenberghe, Geert  
;
Hendrickx, Eric  
;
Gronheid, Roel  
;
Vaglio Pret, Alessandro  
;
Mallik, Arindam  
;
Verkest, Diederik  
;
Steegen, An

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