Publication:
Influences of hydrogen on losses in silicon oxynitride planar optical waveguides
Date
| dc.contributor.author | Sahu, B. S. | |
| dc.contributor.author | Agnihotri, Om Prakash | |
| dc.contributor.author | Jain, Suresh | |
| dc.contributor.author | Mertens, Robert | |
| dc.contributor.author | Nijs, Johan | |
| dc.contributor.author | Isamu, K. | |
| dc.contributor.imecauthor | Mertens, Robert | |
| dc.date.accessioned | 2021-10-14T13:42:27Z | |
| dc.date.available | 2021-10-14T13:42:27Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4716 | |
| dc.source.beginpage | 438 | |
| dc.source.conference | Proceedings of the International Conference on the Physics of Semiconductor Devices; December 1999; New Delhi, India. | |
| dc.source.conferencelocation | ||
| dc.source.endpage | 443 | |
| dc.title | Influences of hydrogen on losses in silicon oxynitride planar optical waveguides | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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