Publication:
Metal gate work function control for advanced MOSFET applications
Date
| dc.contributor.author | Li, Zilan | |
| dc.contributor.thesisadvisor | De Meyer, Kristin | |
| dc.contributor.thesisadvisor | De Gendt, Stefan | |
| dc.date.accessioned | 2021-10-18T00:01:46Z | |
| dc.date.available | 2021-10-18T00:01:46Z | |
| dc.date.embargo | 9999-12-31 | |
| dc.date.issued | 2009-09 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/15714 | |
| dc.title | Metal gate work function control for advanced MOSFET applications | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | Original bundle
| |
| Publication available in collections: |