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Pathways for Retention Boost in Atomic Layer Etched IGZO-Based Capacitorless DRAM

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dc.contributor.authorIzukashi, K.
dc.contributor.authorMatsubayashi, D.
dc.contributor.authorBelmonte, A.
dc.contributor.authorKundu, S.
dc.contributor.authorWan, Y.
dc.contributor.authorRedondo, F. G.
dc.contributor.authorOh, H.
dc.contributor.authorSharma, A.
dc.contributor.authorSubhechha, S.
dc.contributor.authorPuliyalil, H.
dc.contributor.authorChasin, A.
dc.contributor.authorDekkers, H.
dc.contributor.authorPavel, A.
dc.contributor.authorRassoul, N.
dc.contributor.authorKar, G. S.
dc.contributor.imecauthorMatsubayashi, D.
dc.contributor.imecauthorBelmonte, A.
dc.contributor.imecauthorKundu, S.
dc.contributor.imecauthorWan, Y.
dc.contributor.imecauthorRedondo, F. G.
dc.contributor.imecauthorOh, H.
dc.contributor.imecauthorSharma, A.
dc.contributor.imecauthorSubhechha, S.
dc.contributor.imecauthorPuliyalil, H.
dc.contributor.imecauthorChasin, A.
dc.contributor.imecauthorDekkers, H.
dc.contributor.imecauthorPavel, A.
dc.contributor.imecauthorRassoul, N.
dc.contributor.imecauthorKar, G. S.
dc.date.accessioned2025-07-14T03:56:26Z
dc.date.available2025-07-14T03:56:26Z
dc.date.issued2025-JUL
dc.description.wosFundingTextThis work was supported in part by the NanoIC Pilot Line of Acquisition and Operation are Jointly Funded by the Chips Joint Undertaking through the European Union's Digital Europe under Grant 101183266, in part by the Horizon Europe programs under Grant 101183277, and in part by the Participating States Belgium (Flanders), France, Germany, Finland, Ireland and Romania. The review of this letter was arranged by Editor S. Yu.
dc.identifier.doi10.1109/LED.2025.3564187
dc.identifier.issn0741-3106
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/45904
dc.publisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
dc.source.beginpage1111
dc.source.endpage1114
dc.source.issue7
dc.source.journalIEEE ELECTRON DEVICE LETTERS
dc.source.numberofpages4
dc.source.volume46
dc.title

Pathways for Retention Boost in Atomic Layer Etched IGZO-Based Capacitorless DRAM

dc.typeJournal article
dspace.entity.typePublication
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