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Foundry processes for silicon photonics

Date

 
dc.contributor.authorDumon, Pieter
dc.date.accessioned2021-10-18T16:07:44Z
dc.date.available2021-10-18T16:07:44Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17045
dc.source.conference15th European Conference on Integrated Optics - ECIO
dc.source.conferencedate6/04/2010
dc.source.conferencelocationCambridge UK
dc.title

Foundry processes for silicon photonics

dc.typeProceedings paper
dspace.entity.typePublication
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