Publication:

Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope

Date

2009
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorArstila, Kai
dc.contributor.authorHantschel, Thomas
dc.contributor.authorKleindiek, Stephan
dc.contributor.authorSterr, Jochen
dc.contributor.authorVaquette, Quentin
dc.contributor.authorDemeulemeester, Cindy
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.date.accessioned2021-10-17T21:18:22Z
dc.date.available2021-10-17T21:18:22Z
dc.date.issued2009
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/14914
dc.source.conference35th International Conference on Micro & Nano Engineering - MNE
dc.source.conferencedate28/09/2009
dc.source.conferencelocationGent Belgium
dc.title

Optical force measurement system with mirror probe for nanoprobing inside a scanning electron microscope

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions