Publication:

Analysis of oxygen thermal donor formation in n-type CZ silicon

Date

2003
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorRafi, Joan Marc
dc.contributor.authorSimoen, Eddy
dc.contributor.authorClaeys, Cor
dc.contributor.authorUlyashin, A.G.
dc.contributor.authorJob, R.
dc.contributor.authorFahrner, W.R.
dc.contributor.authorVersluys, J.
dc.contributor.authorClauws, P.
dc.contributor.authorLozano, M.
dc.contributor.authorCampabadal, F.
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.accessioned2021-10-15T06:19:00Z
dc.date.available2021-10-15T06:19:00Z
dc.date.embargo9999-12-31
dc.date.issued2003
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/8055
dc.source.beginpage96
dc.source.conferenceAnalytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes
dc.source.conferencedate28/04/2003
dc.source.conferencelocationParis France
dc.source.endpage105
dc.title

Analysis of oxygen thermal donor formation in n-type CZ silicon

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
7279.pdf
Size:
438.55 KB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions