Publication:
Silicides for 0.13 μm technologies and beyond
Date
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-14T13:18:37Z | |
| dc.date.available | 2021-10-14T13:18:37Z | |
| dc.date.issued | 2000 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/4550 | |
| dc.source.conference | MRS Spring Meeting 2000. Symposium C: Gate Stack and Silicide Issues in Silicon Processing; 24-28 April 2000; San Francisco, Ca, | |
| dc.source.conferencelocation | ||
| dc.title | Silicides for 0.13 μm technologies and beyond | |
| dc.type | Oral presentation | |
| dspace.entity.type | Publication | |
| Files | ||
| Publication available in collections: |