Publication:

TEM analysis in semiconductor industry: R&D examples of future needs

Date

2010
Meeting abstract
Simple item page Full metadata Statistics
 
dc.contributor.authorRichard, Olivier
dc.contributor.authorGeypen, Jef
dc.contributor.authorFavia, Paola
dc.contributor.authorVerleysen, Eveline
dc.contributor.authorMarrant, Koen
dc.contributor.authorVan Marcke, Patricia
dc.contributor.authorBender, Hugo
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorGeypen, Jef
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorVan Marcke, Patricia
dc.contributor.imecauthorBender, Hugo
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.date.accessioned2021-10-18T20:49:18Z
dc.date.available2021-10-18T20:49:18Z
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17881
dc.source.conferenceInternational Microscopy Congress - IMC17
dc.source.conferencedate20/09/2010
dc.source.conferencelocationRio de Janeiro Brasil
dc.title

TEM analysis in semiconductor industry: R&D examples of future needs

dc.typeMeeting abstract
dspace.entity.typePublication
Files
Publication available in collections:
Conference contributions