Publication:
Optical characteristics of low-k films and barrier layers in the ultra-violet range
Date
| dc.contributor.author | Eslava Fernandez, Salvador | |
| dc.contributor.author | Baklanov, Mikhaïl | |
| dc.contributor.author | Foubert, Philippe | |
| dc.contributor.author | Eymery, Guillaume | |
| dc.contributor.author | Maex, Karen | |
| dc.contributor.imecauthor | Foubert, Philippe | |
| dc.contributor.imecauthor | Maex, Karen | |
| dc.date.accessioned | 2021-10-16T16:02:49Z | |
| dc.date.available | 2021-10-16T16:02:49Z | |
| dc.date.issued | 2007 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/12133 | |
| dc.source.conference | 4th International Conference on Spectroscopic Ellipsometry - ICSE | |
| dc.source.conferencedate | 11/06/2007 | |
| dc.source.conferencelocation | Stockholm Sweden | |
| dc.title | Optical characteristics of low-k films and barrier layers in the ultra-violet range | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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